منابع مشابه
3D Simulation of Nano-Imprint Lithography
A proof of concept study of the feasibility of fully three-dimensional (3D) time-dependent simulation of nano-imprint lithography of polymer melt, where the polymer is treated as a structured liquid, has been presented. Considering the flow physics of the polymer as a structured liquid, we have followed the line initiated by de Gennes, using a Molecular Stress Function model of the Doi and Edwa...
متن کاملHigh-quality AlN epitaxy on nano-patterned sapphire substrates prepared by nano-imprint lithography
We report epitaxial growth of AlN films with atomically flat surface on nano-patterned sapphire substrates (NPSS) prepared by nano-imprint lithography. The crystalline quality can be greatly improved by using the optimized 1-μm-period NPSS. The X-ray diffraction ω-scan full width at half maximum values for (0002) and (102) reflections are 171 and 205 arcsec, respectively. The optimized NPSS con...
متن کاملStep and Flash Imprint Lithography
The goal of the SFIL development program is to enable patterning of sub-100 nm features at room temperature and with minimal applied pressure. We believe the use of low viscosity materials and photopolymerization chemistry will enable SFIL to achieve the throughput required for use in the microelectronics industry. Additionally, the rigid transparent imprint template used in SFIL enables a prec...
متن کاملIn-situ monitoring of pattern filling in nano-imprint lithography using surface plasmon resonance.
Nano-imprint lithography possesses the advantages of high throughput, sub-10-nm feature and low cost. In NIL, the mold filling is subjected to the applied imprinting pressure, temperature and time. Incomplete mold filling causes a detrimental effect on the final imprinted pattern dimensions. The monitoring system of imprinting is essential to control the imprinting parameters properly. Up to no...
متن کامل2005: An Analysis: Traditional Semiconductor Lithography Versus Emerging Technology (Nano Imprint)
The introduction of emerging technologies into existing manufacturing facilities is not necessarily encouraged by the people responsible for the output of the facilities. Any “new” technology carries risks and people responsible for delivering manufactured products are, by nature, riskadverse. This paper demonstrates the advantage of evaluating the impact of attempting to introduce a new techno...
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ژورنال
عنوان ژورنال: Nanoscale Research Letters
سال: 2009
ISSN: 1931-7573,1556-276X
DOI: 10.1007/s11671-009-9475-7